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| Part Number | EK-F5X SFC/SFM6XXX AND SFC/SFM5XXX | EK-F3X | EK-F4X | EK-P3 | EK-P5 |
| Manufacturer | Sensirion AG | Sensirion AG | Sensirion AG | Sensirion AG | Sensirion AG |
| Series | CMOSens® | CMOSens® | CMOSens® | CMOSens® | CMOSens® |
| Packaging | Box | Box | Box | Box | Bulk |
| Product Status | Active | Obsolete | Obsolete | Obsolete | Obsolete |
| Sensor Type | Flow, Gas | Flow, Gas | Flow, Gas | Pressure | Pressure |
| Sensing Range | - | ±200slm | 0slm ~ 20slm | - | - |
| Interface | Digital, RS-485 | I2C, Serial | I2C, Serial | I2C, Serial | Analog and Digital |
| Sensitivity | - | ±1.5% | ±3% | - | - |
| Voltage - Supply | - | 4.75V ~ 5.25V | 5V ~ 9V | - | - |
| Embedded | Yes | - | - | - | - |
| Contents | Board(s), Cable(s), Power Supply, Accessories | Board(s), Cable(s) | Board(s), Cable(s) | Board(s), Cable(s) | Board(s) |
| Utilized IC / Part | SFC5xxx, SFM5xxx, SFC6xxx, SFM6xxx | SFM3000 | SFM4100 | SDP600 | SDP800 |
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